International Standardization for Nanostructure Measurement by Scanning Probe Microscopy

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Global standardization of scanning probe microscopy

Recent efforts to achieve global standardization of scanning probe microscopy (SPM) including noncontact atomic force microscopy (NC-AFM), especially through the International Organization for Standardization (ISO) and related research, are surveyed. Since the unification of terminology for SPM is a prerequisite for standardization, it should have the first priority, followed by the unification...

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ژورنال

عنوان ژورنال: Journal of the Vacuum Society of Japan

سال: 2013

ISSN: 1882-2398,1882-4749

DOI: 10.3131/jvsj2.56.267